Open AccessEffect of Deposition Temperature on the Electrical Performance of SiZnSnO Thin Film Transistors Fabricated by RF Magnetron Sputtering
Author(s) -
Kyung Min Ko,
Sang Yeol Lee
Publication year - 2014
Publication title -
journal of the korean institute of electrical and electronic material engineers
Language(s) - English
Resource type - Journals
eISSN - 2288-3258
pISSN - 1226-7945
DOI - 10.4313/jkem.2014.27.5.282
Subject(s) - materials science , amorphous solid , thin film , sputter deposition , thin film transistor , deposition (geology) , transistor , optoelectronics , threshold voltage , sputtering , composite material , voltage , electrical engineering , nanotechnology , layer (electronics) , crystallography , chemistry , paleontology , engineering , sediment , biology
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