Open AccessFabrication of AlN Thin Film by Reactive RF Magnetron Sputtering and Sensing Characteristics of Oil Pressure
Author(s) -
Hye-Won Seok,
Sei-Ki Kim,
Yang-Koo Kang,
Yeon-Woo Hong,
YoungJin Lee,
ByeongKwon Ju
Publication year - 2014
Publication title -
journal of the korean institute of electrical and electronic material engineers
Language(s) - English
Resource type - Journals
eISSN - 2288-3258
pISSN - 1226-7945
DOI - 10.4313/jkem.2014.27.12.815
Subject(s) - materials science , thin film , amorphous solid , nitride , sputter deposition , sputtering , inconel , substrate (aquarium) , crystallite , cavity magnetron , optoelectronics , composite material , layer (electronics) , analytical chemistry (journal) , metallurgy , alloy , nanotechnology , crystallography , chemistry , oceanography , chromatography , geology
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