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Fabrication and Properties of ZnSnO3Piezoelectric Films Deposited by a Pulsed Laser Deposition
Author(s) -
Byeong-Ju Park,
SoonGil Yoon
Publication year - 2014
Publication title -
journal of the korean institute of electrical and electronic material engineers
Language(s) - English
Resource type - Journals
eISSN - 2288-3258
pISSN - 1226-7945
DOI - 10.4313/jkem.2014.27.1.18
Subject(s) - materials science , pulsed laser deposition , piezoelectricity , thin film , fabrication , annealing (glass) , dielectric , deposition (geology) , composite material , analytical chemistry (journal) , optoelectronics , nanotechnology , medicine , paleontology , alternative medicine , pathology , sediment , biology , chemistry , chromatography

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