Open AccessThe Effect of Zn/Sn Different Raito of InZnSnO Thin Films Prepared by RF Magnetron Sputtering
Author(s) -
Ki Hwan Kim,
Maryane Putri,
Chang Young Koo,
Junga Lee,
Jeong-Joo Kim,
Hee Young Lee
Publication year - 2013
Publication title -
jeon'gi jeonja jaeryo haghoe nonmunji/jeon-gi jeonja jaeryo hakoe nonmunji
Language(s) - English
Resource type - Journals
eISSN - 2288-3258
pISSN - 1226-7945
DOI - 10.4313/jkem.2013.26.8.591
Subject(s) - indium , materials science , thin film , indium tin oxide , sputter deposition , doping , substrate (aquarium) , oxide , zinc , electrical resistivity and conductivity , tin , analytical chemistry (journal) , sputtering , cavity magnetron , metallurgy , optoelectronics , nanotechnology , chemistry , electrical engineering , oceanography , engineering , chromatography , geology