Open AccessStructural, Optical, and Electrical Properties of Sputtered Al doped ZnO Thin Film Under Various RF Powers
Author(s) -
Jongwook Kim,
Deok-Kyu Kim,
Hong-Bae Kim
Publication year - 2011
Publication title -
journal of the korean institute of electrical and electronic material engineers
Language(s) - English
Resource type - Journals
eISSN - 2288-3258
pISSN - 1226-7945
DOI - 10.4313/jkem.2011.24.3.177
Subject(s) - materials science , thin film , crystallinity , transmittance , sputtering , doping , optoelectronics , band gap , sputter deposition , dopant , composite material , optics , nanotechnology , physics
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