
Raman Scattering Characteristics of Polycrystalline 3C-SiC Thin Films deposited on AlN Buffer Layer
Author(s) -
GwiySang Chung,
KangSan Kim
Publication year - 2008
Publication title -
jeon'gi jeonja jaeryo haghoe nonmunji/jeon-gi jeonja jaeryo hakoe nonmunji
Language(s) - English
Resource type - Journals
eISSN - 2288-3258
pISSN - 1226-7945
DOI - 10.4313/jkem.2008.21.6.493
Subject(s) - materials science , crystallite , buffer (optical fiber) , layer (electronics) , composite material , raman spectroscopy , raman scattering , thin film , optoelectronics , optics , metallurgy , nanotechnology , computer science , telecommunications , physics