Open AccessElectrical Properties of Diamond-like Carbon Thin Film synthesized by PECVD
Publication year - 2008
Publication title -
jeon'gi jeonja jaeryo haghoe nonmunji/jeon-gi jeonja jaeryo hakoe nonmunji
Language(s) - English
Resource type - Journals
eISSN - 2288-3258
pISSN - 1226-7945
DOI - 10.4313/jkem.2008.21.11.973
Subject(s) - plasma enhanced chemical vapor deposition , materials science , diamond like carbon , chemical vapor deposition , carbon film , thin film , hydrogen , carbon fibers , silicon , band gap , diamond , optoelectronics , analytical chemistry (journal) , nanotechnology , composite material , composite number , chemistry , organic chemistry , chromatography