Open AccessRaman Scattering Characteristics on 3C-SiC Thin Films Deposited by APCVD Method
Author(s) -
Jun-Ho Jeong,
Gwiy-Sang Chung
Publication year - 2007
Publication title -
journal of the korean institute of electrical and electronic material engineers
Language(s) - English
Resource type - Journals
eISSN - 2288-3258
pISSN - 1226-7945
DOI - 10.4313/jkem.2007.20.7.606
Subject(s) - materials science , full width at half maximum , raman spectroscopy , phonon , crystallite , crystallinity , raman scattering , substrate (aquarium) , thin film , crystal (programming language) , condensed matter physics , analytical chemistry (journal) , optics , optoelectronics , nanotechnology , composite material , physics , chemistry , oceanography , chromatography , geology , metallurgy , programming language , computer science
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