Open AccessA Study on Detailed Structural Variation of Diamond-like Carbon Thin Film by a Novel Raman Mapping Method
Publication year - 2006
Publication title -
jeon'gi jeonja jaeryo haghoe nonmunji/jeon-gi jeonja jaeryo hakoe nonmunji
Language(s) - English
Resource type - Journals
eISSN - 2288-3258
pISSN - 1226-7945
DOI - 10.4313/jkem.2006.19.7.618
Subject(s) - raman spectroscopy , materials science , diamond like carbon , plasma enhanced chemical vapor deposition , carbon film , chemical vapor deposition , analytical chemistry (journal) , methane , surface roughness , carbon fibers , composite material , silicon , hydrogen , thin film , surface finish , raman microscope , nanotechnology , optoelectronics , raman scattering , optics , composite number , chemistry , physics , organic chemistry , chromatography