Open AccessFormation of Ni Oxide Thin Film and Analysis of Its Characteristics for Thermal Sensors
Author(s) -
Eung-Ahn Lee,
Jeong-Hwan Seo,
Sang-Soo Noh
Publication year - 2005
Publication title -
journal of the korean institute of electrical and electronic material engineers
Language(s) - English
Resource type - Journals
eISSN - 2288-3258
pISSN - 1226-7945
DOI - 10.4313/jkem.2005.18.2.169
Subject(s) - thin film , materials science , annealing (glass) , electrical resistivity and conductivity , oxide , analytical chemistry (journal) , atmospheric temperature range , crystallization , temperature coefficient , sputter deposition , sputtering , composite material , metallurgy , nanotechnology , electrical engineering , chemistry , physics , thermodynamics , chromatography , engineering
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