Open AccessEffect of AIN Buffers by R. F. Sputter on Defects of GaN Thin films
Publication year - 2004
Publication title -
journal of the korean institute of electrical and electronic material engineers
Language(s) - English
Resource type - Journals
eISSN - 2288-3258
pISSN - 1226-7945
DOI - 10.4313/jkem.2004.17.5.497
Subject(s) - materials science , sputtering , optoelectronics , thin film , composite material , sputter deposition , nanotechnology
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