Open AccessA Study on Sb2O3Beam Tuning and Monitoring in Antimony Implantation -
Author(s) -
김상용,
Hun-Sang Chung,
ChangEuiGoo,
최민호,
김남훈
Publication year - 2004
Publication title -
jeon'gi jeonja jaeryo haghoe nonmunji/jeon-gi jeonja jaeryo hakoe nonmunji
Language(s) - English
Resource type - Journals
eISSN - 2288-3258
pISSN - 1226-7945
DOI - 10.4313/jkem.2004.17.5.476
Subject(s) - antimony , materials science , arsenic , doping , dopant , sheet resistance , diffusion , beam (structure) , optoelectronics , layer (electronics) , composite material , optics , metallurgy , physics , thermodynamics