Open AccessA Study on the Deposition Characteristics of ZnO Piezoelectric Thin film Bulk Acoustic Resonator
Publication year - 2003
Publication title -
journal of the korean institute of electrical and electronic material engineers
Language(s) - English
Resource type - Journals
eISSN - 2288-3258
pISSN - 1226-7945
DOI - 10.4313/jkem.2003.16.8.716
Subject(s) - materials science , electrode , thin film , sputtering , diffraction , surface roughness , composite material , resonator , piezoelectricity , deposition (geology) , surface finish , optoelectronics , optics , nanotechnology , paleontology , physics , sediment , biology , chemistry
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