Open AccessA Study on the Deposition Characteristics of ZnO Piezoelectric Thin film Bulk Acoustic Resonator
Publication year - 2003
Publication title -
jeon'gi jeonja jaeryo haghoe nonmunji/jeon-gi jeonja jaeryo hakoe nonmunji
Language(s) - English
Resource type - Journals
eISSN - 2288-3258
pISSN - 1226-7945
DOI - 10.4313/jkem.2003.16.8.716
Subject(s) - materials science , electrode , thin film , sputtering , diffraction , surface roughness , composite material , resonator , piezoelectricity , deposition (geology) , surface finish , optoelectronics , optics , nanotechnology , paleontology , physics , sediment , biology , chemistry