Open AccessCharacteristics of Non-alloyed Mo Ohmic Contacts to Laser Activated p-type SiC
Publication year - 2003
Publication title -
jeon'gi jeonja jaeryo haghoe nonmunji/jeon-gi jeonja jaeryo hakoe nonmunji
Language(s) - English
Resource type - Journals
eISSN - 2288-3258
pISSN - 1226-7945
DOI - 10.4313/jkem.2003.16.7.557
Subject(s) - materials science , ohmic contact , laser , fabrication , dopant , optoelectronics , dopant activation , omega , voltage , mosfet , electrical engineering , doping , composite material , optics , transistor , medicine , physics , alternative medicine , layer (electronics) , pathology , quantum mechanics , engineering