Open AccessFabrication Technology for Improving Pattern Quality in Two-Dimensional Photonic Crystal Structure
Publication year - 2003
Publication title -
jeon'gi jeonja jaeryo haghoe nonmunji/jeon-gi jeonja jaeryo hakoe nonmunji
Language(s) - English
Resource type - Journals
eISSN - 2288-3258
pISSN - 1226-7945
DOI - 10.4313/jkem.2003.16.6.515
Subject(s) - photonic crystal , materials science , fabrication , photonics , lithography , photonic integrated circuit , quality (philosophy) , dimension (graph theory) , optoelectronics , nanometre , critical dimension , electronic circuit , nanotechnology , optics , engineering , electrical engineering , physics , medicine , alternative medicine , mathematics , pathology , quantum mechanics , composite material , pure mathematics