Study on Damage Reduction of (Ba0.6Sr0.4)TiO3Thin Films in Ar/CF4Plasma | Zendy

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Study on Damage Reduction of (Ba_0.6Sr_0.4)TiO₃Thin Films in Ar/CF₄Plasma

Publication year - 2003

Publication title -

jeon'gi jeonja jaeryo haghoe nonmunji/jeon-gi jeonja jaeryo hakoe nonmunji

Language(s) - English

Resource type - Journals

eISSN - 2288-3258

pISSN - 1226-7945

DOI - 10.4313/jkem.2003.16.6.460

Subject(s) - materials science , thin film , plasma , analytical chemistry (journal) , nanotechnology , chemistry , physics , chromatography , quantum mechanics

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