Open AccessCharacterization of the Annealing Effect of 0.5 % Ce-doped Ba(Zr0.2Ti0.8)O3Thin Films Grown by Rf Magnetron Sputtering Method
Publication year - 2003
Publication title -
journal of the korean institute of electrical and electronic material engineers
Language(s) - English
Resource type - Journals
eISSN - 2288-3258
pISSN - 1226-7945
DOI - 10.4313/jkem.2003.16.5.361
Subject(s) - materials science , annealing (glass) , sputter deposition , surface roughness , analytical chemistry (journal) , doping , thin film , sputtering , surface finish , electrode , cavity magnetron , composite material , optoelectronics , nanotechnology , chemistry , chromatography
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom