Open AccessSiH4Soak Effects in the W plug CVD Process
Publication year - 2003
Publication title -
journal of the korean institute of electrical and electronic material engineers
Language(s) - English
Resource type - Journals
eISSN - 2288-3258
pISSN - 1226-7945
DOI - 10.4313/jkem.2003.16.1.001
Subject(s) - spark plug , chemical vapor deposition , tin , materials science , deposition (geology) , process (computing) , metal , chemistry , metallurgy , optoelectronics , mechanical engineering , engineering , computer science , paleontology , sediment , biology , operating system
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