Open AccessMechanical Characteristics of Crystalline Carbon Nitride Films Grown by Reactive Sputtering
Publication year - 2002
Publication title -
jeon'gi jeonja jaeryo haghoe nonmunji/jeon-gi jeonja jaeryo hakoe nonmunji
Language(s) - English
Resource type - Journals
eISSN - 2288-3258
pISSN - 1226-7945
DOI - 10.4313/jkem.2002.15.2.147
Subject(s) - materials science , nitride , sputtering , nitriding , metallurgy , martensite , carbon nitride , layer (electronics) , carbon fibers , composite material , brittleness , thin film , microstructure , nanotechnology , biochemistry , chemistry , photocatalysis , composite number , catalysis