Open AccessMechanical Characteristics of Crystalline Carbon Nitride Films Grown by Reactive Sputtering
Publication year - 2002
Publication title -
journal of the korean institute of electrical and electronic material engineers
Language(s) - English
Resource type - Journals
eISSN - 2288-3258
pISSN - 1226-7945
DOI - 10.4313/jkem.2002.15.2.147
Subject(s) - materials science , nitride , sputtering , nitriding , metallurgy , martensite , carbon nitride , layer (electronics) , carbon fibers , composite material , brittleness , thin film , microstructure , nanotechnology , biochemistry , chemistry , photocatalysis , composite number , catalysis
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