Open AccessFabrication of 3-Dimensional Microstructures for Bulk Micromachining by SDB and Electrochemical Etch-Stop
Publication year - 2002
Publication title -
jeon'gi jeonja jaeryo haghoe nonmunji/jeon-gi jeonja jaeryo hakoe nonmunji
Language(s) - English
Resource type - Journals
eISSN - 2288-3258
pISSN - 1226-7945
DOI - 10.4313/jkem.2002.15.11.958
Subject(s) - deep reactive ion etching , materials science , fabrication , wafer , bulk micromachining , surface micromachining , microelectromechanical systems , microstructure , silicon on insulator , annealing (glass) , optoelectronics , wafer bonding , composite material , etching (microfabrication) , reactive ion etching , silicon , layer (electronics) , medicine , alternative medicine , pathology