Open AccessSolid-state seeded nano-second pulse CO2 oscillator for extreme ultraviolet lithography
Author(s) -
K. Nowak
Publication year - 2013
Publication title -
photonics letters of poland
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.184
H-Index - 16
ISSN - 2080-2242
DOI - 10.4302/plp.2013.3.06
Subject(s) - extreme ultraviolet lithography , physics , laser , optics , extreme ultraviolet , amplifier , optoelectronics , cmos