Open AccessEllipsometric study of carbon nitride films deposited by DC-magnetron sputtering
Author(s) -
R. Hippler,
Abhijit Majumdar,
Robert Bogdanowicz
Publication year - 2011
Publication title -
photonics letters of poland
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.184
H-Index - 16
ISSN - 2080-2242
DOI - 10.4302/plp.2011.2.09
Subject(s) - sputter deposition , carbon nitride , nitride , engineering physics , materials science , optoelectronics , high power impulse magnetron sputtering , sputtering , environmental science , nanotechnology , engineering , thin film , chemistry , layer (electronics) , biochemistry , photocatalysis , catalysis