Open AccessA New Approach for Heavy N-Doping Process in Ge Epilayers Using Specific Solid Source
Author(s) -
Luong Thi Kim Phuong
Publication year - 2018
Publication title -
optics and photonics journal
Language(s) - English
Resource type - Journals
eISSN - 2160-889X
pISSN - 2160-8881
DOI - 10.4236/opj.2018.82002
Subject(s) - doping , process (computing) , computer science , materials science , optoelectronics , operating system