Open AccessAcidic Polyester Imides as Thermally Stable Binder Polymers for Negative-Tone Black Photoresist
Author(s) -
Genggongwo Shi,
Kyeongha Baek,
Jun Bae,
Lee Soon Park
Publication year - 2020
Publication title -
materials sciences and applications
Language(s) - English
Resource type - Journals
eISSN - 2153-1188
pISSN - 2153-117X
DOI - 10.4236/msa.2020.114016
Subject(s) - materials science , photoresist , diimide , polyester , thermal stability , polymer , imide , oled , polyimide , acrylate , chemical engineering , polymer chemistry , composite material , organic chemistry , molecule , layer (electronics) , monomer , chemistry , perylene , engineering