Open AccessSynthesis and Electrical Characterization of BaTiO3 Thin Films on Si(100)
Author(s) -
Vijay Ramkrishna Chinchamalatpure,
Saswath Ghosh,
G. N. Chaudhari
Publication year - 2010
Publication title -
materials sciences and applications
Language(s) - English
Resource type - Journals
eISSN - 2153-1188
pISSN - 2153-117X
DOI - 10.4236/msa.2010.14029
Subject(s) - materials science , thin film , crystallinity , scanning electron microscope , substrate (aquarium) , spin coating , characterization (materials science) , diffraction , calcination , capacitance , optoelectronics , composite material , optics , nanotechnology , electrode , oceanography , physics , biochemistry , chemistry , geology , catalysis
BaTiO3 thin film has been deposited on Si(100) substrate using sol-gel process and deposited by using spin – coating technique. The BaTiO3/Si(100) structures were studied by structural and electrical characteristics. The X-ray diffrac-tion of BaTiO3/Si(100) shows that the diffraction peaks become increasing sharp with increasing calcination tempera-tures indicating the enhance crystallinity of the films. Scanning electron microscopy of BaTiO3 thin films shows the crack free and uniform nature. The capacitance-voltage measurement of BaTiO3 thin film deposited on Si(100) an-nealed at 600℃ shows large frequency dispersion in the accumulation region. The current-voltage measurement of BaTiO3/Si shows the ideality factor was approaches to unity at 600℃