Open AccessNumerical Simulation on the Comb Drive Micro-Accelerometer
Author(s) -
Xin Zhao
Publication year - 2017
Publication title -
modern mechanical engineering
Language(s) - English
Resource type - Journals
eISSN - 2164-0181
pISSN - 2164-0165
DOI - 10.4236/mme.2017.74008
Subject(s) - multiphysics , capacitance , microelectromechanical systems , accelerometer , comb drive , visualization , displacement (psychology) , measure (data warehouse) , materials science , process (computing) , frequency domain , mechanical engineering , capacitive sensing , acoustics , computer science , electronic engineering , structural engineering , engineering , finite element method , electrical engineering , optoelectronics , physics , fabrication , alternative medicine , database , psychotherapist , pathology , operating system , psychology , quantum mechanics , computer vision , medicine , electrode