Open AccessTerahertz Bessel Beam Applied to Thickness Measurement of Ellipsometry Methods
Author(s) -
Siyu Tu,
Kejia Wang,
Jinsong Liu,
Zhengang Yang
Publication year - 2021
Publication title -
journal of computer and communications
Language(s) - English
Resource type - Journals
eISSN - 2327-5227
pISSN - 2327-5219
DOI - 10.4236/jcc.2021.912010
Subject(s) - ellipsometry , optics , terahertz radiation , materials science , diffraction , bessel beam , bessel function , optoelectronics , physics , thin film , nanotechnology