Open AccessSummary of Research Status and Application of MEMS Accelerometers
Author(s) -
Weimeng Niu,
Liqing Fang,
Lei Xu,
Xu Li,
Ruikun Huo,
Deqing Guo,
Ziyuan Qi
Publication year - 2018
Publication title -
journal of computer and communications
Language(s) - English
Resource type - Journals
eISSN - 2327-5227
pISSN - 2327-5219
DOI - 10.4236/jcc.2018.612021
Subject(s) - accelerometer , microelectromechanical systems , piezoresistive effect , capacitive sensing , piezoelectric accelerometer , engineering , electrical engineering , computer science , electronic engineering , materials science , piezoelectricity , piezoelectric sensor , nanotechnology , operating system