Open AccessInvestigation of Inhomogeneity in Single Crystal SiC Wafers Using C-Scan Acoustic Scanning Microscopy
Author(s) -
Ibrahim AbdelMotaleb
Publication year - 2020
Publication title -
crystal structure theory and applications
Language(s) - English
Resource type - Journals
eISSN - 2169-2505
pISSN - 2169-2491
DOI - 10.4236/csta.2020.91001
Subject(s) - wafer , materials science , acoustic microscopy , microscopy , scanning acoustic microscope , scanning electron microscope , optoelectronics , optics , composite material , physics