Open Access非晶硅薄膜太阳电池生产工艺的优化<br>Optimization of Amorphous Silicon Thin Film Solar Cells Production Process
Author(s) -
王 彩娜
Publication year - 2011
Publication title -
ying yong wi li/ying yong wu li
Language(s) - English
Resource type - Journals
eISSN - 2160-7567
pISSN - 2160-7575
DOI - 10.4236/app.2011.11004
Subject(s) - amorphous silicon , materials science , amorphous solid , silicon , process (computing) , production (economics) , optoelectronics , thin film solar cell , thin film , engineering physics , solar cell , nanotechnology , crystalline silicon , computer science , crystallography , physics , chemistry , economics , macroeconomics , operating system
在玻璃衬底非晶硅薄膜太阳电池的生产工艺中第二道激光刻划、溅射AZO背反射膜溅射Al背电极及第三道激光刻划等工序对电池板输出功率有着重要影响。本研究通过Minitab软件设计因子试验针对玻璃衬底非晶硅薄膜太阳电池生产工艺参数进行优化。试验结果表明在一定范围内Al背电极溅射功率对电池板功率影响最大随着溅射功率的增大电池板功率增加随着第三道激光刻划电流、AZO背反射膜溅射功率以及Ar流量的增加电池板输出功率增加而随着第二道激光刻划电流的增加电池板功率下降。最后得到最佳的生产工艺参数。 During the glass substrate amorphous silicon thin film solar cell production process, the laser scribe 2, sputtering AZO back reflected film, sputtering Al film, and laser scribe 3 etc. processes, have great effect on the maximum power (Pmax) of the solar cell. In this paper, we use Minitab software to design factorial experiment and optimize the process parameters. By analyzing the experimental data, we get the conclusion that, between an acceptable range, the sputtering power of Al film has the greatest effect on the Pmax of the solar cell, which increases while the sputtering power increasesand the Pmax increases as the current of laser scribe 3, puttering power of Al films and flux of Ar increase. Otherwise, Pmax decreases as the current of laser scribe 2 increases. By using the factorial experiment, we get the optimum parameters of the process for the present production line