Open AccessStructural Characterization of Thin Epitaxial GaN Films on Polymer Polyimides Substrates by Ion Beam Assisted Deposition
Author(s) -
Sri Vidawati,
Jürgen W. Gerlach,
Benjamin Herold,
B. Rauschenbach
Publication year - 2020
Publication title -
advances in materials physics and chemistry
Language(s) - English
Resource type - Journals
eISSN - 2162-5328
pISSN - 2162-531X
DOI - 10.4236/ampc.2020.109015
Subject(s) - materials science , reflection high energy electron diffraction , optoelectronics , epitaxy , thin film , scanning electron microscope , deposition (geology) , polyimide , ion beam assisted deposition , ion beam , ion , layer (electronics) , nanotechnology , composite material , chemistry , organic chemistry , paleontology , sediment , biology