Low Temperature Characteristics of Schottky Barrier Single Electron and Single Hole Transistors

Schottky barrier single electron transistors (SB‐SETs) and Schottky barrier single hole transistors (SB‐SHTs) are fabricated on a 20‐nm thin silicon‐on‐insulator substrate incorporating e‐beam lithography and a conventional CMOS process technique. Erbium‐ and platinum‐silicide are used as the source and drain material for the SB‐SET and SB‐SHT, respectively. The manufactured SB‐SET and SB‐SHT show typical transistor behavior at room temperature with a high drive current of 550 μA/μm and −376 μA/μm, respectively. At 7 K, these devices show SET and SHT characteristics. For the SB‐SHT case, the oscillation period is 0.22 V, and the estimated quantum dot size is 16.8 nm. The transconductance is 0.05 μS and 1.2 μS for the SB‐SET and SB‐SHT, respectively. In the SB‐SET and SB‐SHT, a high transconductance can be easily achieved as the silicided electrode eliminates a parasitic resistance. Moreover, the SB‐SET and SB‐SHT can be operated as a conventional field‐effect transistor (FET) and SET/SHT depending on the bias conditions, which is very promising for SET/FET hybrid applications. This work is the first report on the successful operations of SET/SHT in Schottky barrier devices.