Open AccessSOI CMOS‐Based Smart Gas Sensor System for Ubiquitous Sensor Networks
Author(s) -
Maeng Sunglyul,
Guha Prasanta,
Udrea Florin,
Ali Syed Z.,
Santra Sumita,
Gardner Julian,
Park Jonghyurk,
Kim SangHyeob,
Moon Seung Eon,
Park KangHo,
Kim JongDae,
Choi Youngjin,
Milne William I.
Publication year - 2008
Publication title -
etri journal
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.295
H-Index - 46
eISSN - 2233-7326
pISSN - 1225-6463
DOI - 10.4218/etrij.08.0108.0101
Subject(s) - silicon on insulator , cmos , wireless sensor network , materials science , electronic circuit , electrical engineering , electronic engineering , energy consumption , embedded system , engineering , computer science , optoelectronics , silicon , computer network
This paper proposes a compact, energy‐efficient, and smart gas sensor platform technology for ubiquitous sensor network (USN) applications. The compact design of the platform is realized by employing silicon‐on‐insulator (SOI) technology. The sensing element is fully integrated with SOI CMOS circuits for signal processing and communication. Also, the micro‐hotplate operates at high temperatures with extremely low power consumption, which is important for USN applications. ZnO nanowires are synthesized onto the micro‐hotplate by a simple hydrothermal process and are patterned by a lift‐off to form the gas sensor. The sensor was operated at 200°C and showed a good response to 100 ppb NO 2 gas.