Open AccessComparison of Conventional and Variable Frequency Microwave Curing of SU8 Photoresist: Effects on the Dielectric, Thermal, and Morphological Properties
Author(s) -
Piyachat Wattanachai,
Christian Antonio
Publication year - 2016
Publication title -
engineering journal
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.246
H-Index - 20
ISSN - 0125-8281
DOI - 10.4186/ej.2016.20.5.169
Subject(s) - photoresist , curing (chemistry) , materials science , dielectric , microwave , composite material , thermal , optoelectronics , engineering , telecommunications , physics , thermodynamics , layer (electronics)
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