Open AccessA Free Boundary Value Problem Modeling Thermal Oxidation of Silicon
Author(s) -
Konrad Gröger,
N. Strecker
Publication year - 1988
Publication title -
zeitschrift für analysis und ihre anwendungen
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.567
H-Index - 35
eISSN - 1661-4534
pISSN - 0232-2064
DOI - 10.4171/zaa/282
Subject(s) - oxide , silicon , layer (electronics) , thermal oxidation , diffusion , materials science , thermal , boundary value problem , boundary layer , chemical engineering , mathematics , thermodynamics , nanotechnology , mathematical analysis , metallurgy , physics , engineering
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