Open AccessEffect of Deposition Temperature on the Property of Pyrolytic SiC Fabricated by the FBCVD Method
Author(s) -
Yeon-Ku Kim,
Weon-Ju Kim,
Sunghwan Yeo,
Moon-Sung Cho
Publication year - 2014
Publication title -
han-guk bunmal yageum hakoeji/han'gug bunmal ya'geum haghoeji
Language(s) - English
Resource type - Journals
eISSN - 2287-8173
pISSN - 1225-7591
DOI - 10.4150/kpmi.2014.21.6.434
Subject(s) - materials science , layer (electronics) , deposition (geology) , pyrolytic carbon , grain size , stoichiometry , coating , silicon carbide , chemical vapor deposition , composite material , analytical chemistry (journal) , nanotechnology , chemical engineering , paleontology , chemistry , organic chemistry , chromatography , pyrolysis , sediment , engineering , biology