Open AccessCrxNy coatings prepared by magnetron sputtering method
Author(s) -
Miroslav Béger,
Peter Jurči,
P. Grgač,
S. MECIAR,
Martin Kusý,
Jakub Hornı́k
Publication year - 2021
Publication title -
kovové materiály
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.22
H-Index - 22
eISSN - 1338-4252
pISSN - 0023-432X
DOI - 10.4149/km_2013_1_1
Subject(s) - materials science , sputter deposition , high power impulse magnetron sputtering , sputtering , cavity magnetron , nanotechnology , thin film