Open AccessFormation of aminosilanes in the hot-wire chemical vapor deposition process using SiH4-NH3 gas mixtures
Author(s) -
Brett Eustergerling,
Yujun Shi
Publication year - 2008
Publication title -
arkivoc
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 58
eISSN - 1551-7012
pISSN - 1551-7004
DOI - 10.3998/ark.5550190.0010.508
Subject(s) - chemistry , chemical vapor deposition , process (computing) , deposition (geology) , chemical engineering , organic chemistry , engineering , paleontology , sediment , computer science , biology , operating system