Open AccessNanophotonic lithography: a versatile tool for manufacturing functional three-dimensional micro-/nano-objects
Author(s) -
Mangirdas Malinauskas,
Gabija Kiršanskė,
Sima Rekštytė,
Tomas Jonavičius,
Eglė Kaziulionytė,
Linas Jonušauskas,
Andrius Žukauskas,
R. Gadonas,
A. Piskarskas
Publication year - 2012
Publication title -
lithuanian journal of physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.269
H-Index - 16
eISSN - 2424-3647
pISSN - 1648-8504
DOI - 10.3952/lithjphys.52404
Subject(s) - materials science , structuring , lithography , laser , template , nanotechnology , nanophotonics , maskless lithography , fluidics , nano , fabrication , throughput , optoelectronics , computer science , electron beam lithography , optics , resist , layer (electronics) , engineering , electrical engineering , alternative medicine , pathology , composite material , medicine , finance , economics , telecommunications , wireless , physics