Nanophotonic lithography: a versatile tool for manufacturing functional three-dimensional micro-/nano-objects | Zendy

Mangirdas Malinauskas | Zendy; Gabija Kiršanskė | Zendy; Sima Rekštytė | Zendy; Tomas Jonavičius | Zendy; Eglė Kaziulionytė | Zendy; Linas Jonušauskas | Zendy; Albertas Žukauskas | Zendy; R. Gadonas | Zendy; A. Piskarskas | Zendy

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Nanophotonic lithography: a versatile tool for manufacturing functional three-dimensional micro-/nano-objects

Author(s) -

Mangirdas Malinauskas,

Gabija Kiršanskė,

Sima Rekštytė,

Tomas Jonavičius,

Eglė Kaziulionytė,

Linas Jonušauskas,

Albertas Žukauskas,

R. Gadonas,

A. Piskarskas

Publication year - 2012

Publication title -

lithuanian journal of physics

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.269

H-Index - 16

eISSN - 2424-3647

pISSN - 1648-8504

DOI - 10.3952/lithjphys.52404

Subject(s) - materials science , structuring , lithography , laser , template , nanotechnology , nanophotonics , maskless lithography , fluidics , nano , fabrication , throughput , optoelectronics , computer science , electron beam lithography , optics , resist , layer (electronics) , engineering , electrical engineering , alternative medicine , pathology , composite material , medicine , finance , economics , telecommunications , wireless , physics

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