Open AccessCurrent Status and Future Plan of Ion Beam Implanters at KOMAC
Author(s) -
Sunmog Yeo
Publication year - 2016
Publication title -
physics and high technology
Language(s) - English
Resource type - Journals
ISSN - 1225-2336
DOI - 10.3938/phit.25.004
Subject(s) - current (fluid) , plan (archaeology) , ion , ion beam , materials science , beam (structure) , engineering physics , optics , physics , electrical engineering , engineering , geography , archaeology , quantum mechanics
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