Open AccessResearch on Lead-free Piezoelectric Films for MEMS Applications
Author(s) -
Chang Won Ahn,
Hai Joon Lee,
Ill Won Kim
Publication year - 2013
Publication title -
physics and high technology
Language(s) - English
Resource type - Journals
ISSN - 1225-2336
DOI - 10.3938/phit.22.003
Subject(s) - microelectromechanical systems , piezoelectricity , lead (geology) , materials science , nanotechnology , composite material , geology , geomorphology
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