Open AccessAirborne PM2.5 characteristics in semiconductor manufacturing facilities
Author(s) -
Kwangmin Choi
Publication year - 2018
Publication title -
aims environmental science
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2372-0352
pISSN - 2372-0344
DOI - 10.3934/environsci.2018.3.216
Subject(s) - plenum space , analytical chemistry (journal) , ultrafine particle , materials science , chemistry , environmental chemistry , physics , nanotechnology , thermodynamics