Open AccessA critique of the approach to controlling electrostatic risk in semiconductor production and identification of a potential risk from the use of equipotential bonding
Author(s) -
Gavin C. Rider
Publication year - 2019
Publication title -
aims electronics and electrical engineering
Language(s) - English
Resource type - Journals
ISSN - 2578-1588
DOI - 10.3934/electreng.2019.4.397
Subject(s) - reticle , equipotential , electrostatic discharge , electric field , semiconductor , field (mathematics) , materials science , semiconductor device fabrication , electric potential , microelectronics , electrostatics , optoelectronics , computer science , electrical engineering , mechanical engineering , engineering , physics , voltage , mathematics , quantum mechanics , wafer , pure mathematics