Open AccessModeling aspects to improve the solution of the inverse problem in scatterometry
Author(s) -
Hermann Groß,
Sebastian Heidenreich,
Mark-Alexander Henn,
Markus Bär,
Andreas Rathsfeld
Publication year - 2015
Publication title -
discrete and continuous dynamical systems. series s
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.481
H-Index - 34
eISSN - 1937-1632
pISSN - 1937-1179
DOI - 10.3934/dcdss.2015.8.497
Subject(s) - monte carlo method , diffraction , optics , extreme ultraviolet lithography , fourier transform , exponential function , surface roughness , statistical physics , surface finish , matrix (chemical analysis) , inverse , wavelength , computational physics , physics , materials science , mathematics , mathematical analysis , statistics , geometry , quantum mechanics , composite material