Open AccessSimulation and Optimization of Temperature Characteristic of Capacitive Micromachined Accelerometer System
Author(s) -
Xia Zhang
Publication year - 2014
Publication title -
journal of applied sciences
Language(s) - English
Resource type - Journals
eISSN - 1812-5662
pISSN - 1812-5654
DOI - 10.3923/jas.2014.325.332
Subject(s) - capacitive sensing , accelerometer , materials science , electronic engineering , acoustics , computer science , mechanical engineering , electrical engineering , engineering , physics , operating system