Open AccessEffects of annealing temperature on electrical characteristics of sputtered Al/Al 2 O 3 /p-Si (MOS) capacitors
Author(s) -
Şenol Kaya,
Erhan Budak,
Ercan Yılmaz
Publication year - 2018
Publication title -
turkish journal of physics
Language(s) - English
Resource type - Journals
eISSN - 1303-6122
pISSN - 1300-0101
DOI - 10.3906/fiz-1805-1
Subject(s) - annealing (glass) , materials science , capacitor , analytical chemistry (journal) , oxide , capacitance , aluminium , optoelectronics , voltage , chemistry , composite material , metallurgy , electrical engineering , electrode , chromatography , engineering