Open AccessConversion efficiency calculations for EUV radiation emitted from laser-produced Tin plasmas
Author(s) -
B. Atalay,
Necla Kenar,
A. Demir
Publication year - 2009
Publication title -
turkish journal of physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.169
H-Index - 26
eISSN - 1303-6122
pISSN - 1300-0101
DOI - 10.3906/fiz-0903-5
Subject(s) - extreme ultraviolet lithography , laser , pulse duration , tin , plasma , radiation , wavelength , pulse (music) , materials science , atomic physics , optics , energy conversion efficiency , intensity (physics) , extreme ultraviolet , physics , optoelectronics , nuclear physics , detector , metallurgy