Open AccessResearch on Low-temperature Bonding Technology Using Metal Nanoparticles Prepared by Magnetron Sputtering
Author(s) -
Junpeng Fang,
Qian Wang,
Jian Cai,
Wan Hanlin,
Chul-Gyu Song,
Kai Zheng,
Zhou Yikang
Publication year - 2022
Publication title -
jixie gongcheng xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.342
H-Index - 50
ISSN - 0577-6686
DOI - 10.3901/jme.2022.02.034
Subject(s) - materials science , sputter deposition , cavity magnetron , nanoparticle , metal , sputtering , optoelectronics , nanotechnology , metallurgy , thin film