Open AccessResearch on Low-temperature Bonding Technology Using Metal Nanoparticles Prepared by Magnetron Sputtering
Author(s) -
Junpeng Fang,
Qian Wang,
CAI Jian,
WAN Hanlin,
Song Chang-ming,
Kai Zheng,
ZHOU Yikang
Publication year - 2022
Publication title -
journal of mechanical engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.342
H-Index - 50
ISSN - 0577-6686
DOI - 10.3901/jme.2022.02.034
Subject(s) - materials science , sputter deposition , cavity magnetron , nanoparticle , metal , sputtering , optoelectronics , nanotechnology , metallurgy , thin film
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