Open AccessProgress in Detection and Suppression Techniques for Processing-induced Sub-surface Defects of Fused Silica Optical Elements
Author(s) -
熔石英光学元件加工亚表面缺陷检测及 抑制技术研究进展,
陈明君,
Mingjun Chen,
Huiyao Wang,
Jian Cheng,
Lina Zhao,
Hao Yang,
Qi Liu,
Chao Tan,
Zhaoyang Yin,
Yang Zican,
Wei Ding
Publication year - 2021
Publication title -
jixie gongcheng xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.342
H-Index - 50
ISSN - 0577-6686
DOI - 10.3901/jme.2021.20.001
Subject(s) - materials science , surface (topology) , optics , computer science , optoelectronics , nanotechnology , physics , mathematics , geometry