Open AccessExperimental Study on Cluster Magnetorheological Variable Gap Dynamic Pressure Planarization Finishing
Author(s) -
Yan Liao,
Botao Lu,
Jiabin Fu
Publication year - 2021
Publication title -
journal of mechanical engineering
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.342
H-Index - 50
ISSN - 0577-6686
DOI - 10.3901/jme.2021.19.021
Subject(s) - chemical mechanical planarization , magnetorheological fluid , materials science , cluster (spacecraft) , variable (mathematics) , composite material , structural engineering , computer science , engineering , mathematics , polishing , mathematical analysis , computer network , damper
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