Open AccessExperimental Study on Cluster Magnetorheological Variable Gap Dynamic Pressure Planarization Finishing
Author(s) -
Lei Yan,
Bin Lü,
Jiabin Fu
Publication year - 2021
Publication title -
jixie gongcheng xuebao
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.342
H-Index - 50
ISSN - 0577-6686
DOI - 10.3901/jme.2021.19.021
Subject(s) - chemical mechanical planarization , magnetorheological fluid , materials science , structural engineering , cluster (spacecraft) , composite material , mechanical engineering , computer science , engineering , polishing , computer network , damper